Title :
Bidirectional electrostatic linear shuffle motor with two degrees of freedom
Author :
Sarajlic, E. ; Berenschot, E. ; Fujita, H. ; Krijnen, G. ; Elwenspoek, M.
fDate :
30 Jan.-3 Feb. 2005
Keywords :
Clamps; Electrostatics; Energy consumption; Fabrication; Legged locomotion; Micromachining; Micromotors; Probes; Silicon; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453949
