DocumentCode
3422526
Title
Linear micromotors and spatial micromechanisms based on UV-LIGA
Author
Cheng, W.-J. ; DeVoe, D.L.
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
399
Lastpage
402
Keywords
Bidirectional control; Bonding; Clamps; Educational institutions; Electrothermal effects; End effectors; Fabrication; Hydraulic actuators; Mechanical engineering; Micromotors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453951
Filename
1453951
Link To Document