Title :
Kinematically-stabilized microbubble actuator arrays
Author :
Yuan, Guang ; Wu, Xaosong ; Yoon, Yong-Kyu ; Allen, Mark G.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A mass-manufacturable endoskeletal micro bubble actuator has been developed and characterized. These pneumatically-actuated devices combine the desirable large deflections of balloon-type actuators with the preferentially-axial deflection of bellows type actuators to produce actuators capable of large deflections in axial directions. This kinematic stabilization is achieved by use of integrated "skeletons" - structures to support desired deflections and suppress unwanted deflections, which underlie the actuator "skin" - elastic structures to help the extended actuator recoil to its original shape. The actuators have been fabricated and characterized, as well as compared with pure-bubble actuators (skin only) and pure-bellows actuators (skeleton only) of the same materials and dimensions. Pure-bubble actuators demonstrated unwanted omni-directional inflation. Pure-bellows actuators demonstrated unstable and irreversible deformation during extension. In contrast, endoskeletal microbubble actuators of 2.6 mm diameter have achieved reversible axial extensions of approximately 0.9 mm.
Keywords :
deformation; kinematics; mechanical stability; microactuators; pneumatic actuators; shapes (structures); 2.6 mm; balloon-type actuators; bellows type actuators; elastic structures; endoskeletal microbubble actuators; irreversible deformation; kinematic stabilization; mass-manufacturable endoskeletal micro bubble actuator; microbubble actuator arrays; pneumatically-actuated devices; preferentially-axial deflection; pure-bellows actuators; pure-bubble actuators; reversible axial extensions; support structures; unstable deformation; unwanted omni-directional inflation; Biomembranes; Computer interfaces; Fabrication; Hydraulic actuators; Kinematics; Microactuators; Pneumatic actuators; Shape; Skeleton; Stability;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453954