Title :
A passive micro gas regulator for hydrogen flow control
Author :
Debray, A. ; Nakakubo, T. ; Ueda, K. ; Mogi, S. ; Shibata, M. ; Fujita, Hideaki
fDate :
30 Jan.-3 Feb. 2005
Keywords :
Fuel cells; Home appliances; Hydrogen; Micromechanical devices; Portable computers; Regulators; Silicon; Valves; Water heating; Water pollution;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453956
