Fabrication of comb-shaped microactuator for multi-degrees-of-freedom system

The authors describe a fabrication method for a comb-shaped microactuator as an element of a multi-degree-of-freedom system. This microactuator is combined with an elastic sheet. The construction of a series of these microactuators corresponds to that of a muscular model. An anisotropic etching technique of (110)-oriented silicon is a very useful method to obtain the comb-shaped actuator with a high aspect ratio. By means of photolithography and this technique, a series of microactuators can be obtained easily. The structure of a multi-degree-of-freedom system is introduced. The strategy to control a series of several actuators is explained. The fabrication process of the comb-shaped microactuator is outlined