DocumentCode
3422789
Title
Development of adhesive contact of MEMS-switches upon actuation cycling
Author
Gregori, Gianluca ; Mihailovich, R.E. ; DeNatale, J.F. ; Clarke, D.R.
Author_Institution
Dept. of Mater., California Univ., Santa Barbara, CA, USA
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
439
Lastpage
442
Abstract
MEMS switches are prone to adhesive failure upon actuation cycling. In this contribution, we present direct measurements of the adhesive contact forces and how they increase with cycling. These are correlated with microstructural changes in the contacts themselves and complementary changes in the electrical characteristics are reported.
Keywords
adhesion; electrical contacts; failure (mechanical); microswitches; MEMS switches; actuation cycling; adhesive contact force measurement; adhesive failure; electrical characteristics; microstructural changes; Bridge circuits; Contacts; Electric variables; Force measurement; Micromechanical devices; Microswitches; Performance evaluation; Switches; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453961
Filename
1453961
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