Title :
3D modeling of contact problems and hysteresis in coupled electro-mechanics
Author :
Gilbert, J.R. ; Ananthasuresh, G.K. ; Senturia, S.D.
Author_Institution :
Microsystems Technol. Lab., MIT, Cambridge, MA, USA
Abstract :
This paper discusses the modeling of electromechanical hysteresis in devices which exhibit contact between components. We make use of a recently developed tool, CoSolve-EM, in order to solve quasistatic 3D contact electro-mechanics for a clamped-clamped beam, calculating full displacement, capacitance and contact force vs. voltage. We then extend the simulations to two design variations of the beam which permit engineering of its hysteresis characteristics
Keywords :
CAD; digital simulation; hysteresis; mechanical engineering computing; micromechanical devices; 3D modeling; CoSolve-EM; capacitance; clamped-clamped beam; contact force; coupled electro-mechanics; displacement; electromechanical hysteresis; hysteresis; quasistatic 3D contact electro-mechanics; Capacitance; Electrodes; Electrostatics; Hydraulic actuators; Hysteresis; Micromechanical devices; Nonlinear equations; Sensor phenomena and characterization; Springs; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493841
