Thin film metallic glasses as new MEMS materials

In order to apply the metallic glasses to MEMS, Pd-based, Zr-based and Cu-based thin film metallic glasses (TFMGs) are fabricated successfully using an RF magnetron sputtering system. The TFMGs exhibit high strength and high elastic limit at room temperature and low viscosity (under 1013 Pa.s) at supercooled liquid region (SCLR). These characteristics are desirable for utilization of TFMGs as three dimensional (3D) micro-elastic-mechanisms. 3D microstructures are realized by novel microforming methods at the SCLR. These methods can be divided into two categories, namely the ´deformation-heating method´ and the ´heating-deformation method´. Using those new microforming methods, 3D MEMS made of TFMG with new shapes and functions are demonstrated.