Title :
Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography
Author :
Utkin, Dmitry E. ; Nasimov, Dmitry A. ; Latyshev, Alexander V.
Author_Institution :
Inst. of Semicond. Phys., Novosibirsk, Russia
Abstract :
It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.
Keywords :
electron beam lithography; optical fabrication; photonic crystals; EBL; close-packing; electron-beam lithography; two-dimensional photonic crystals; Design automation; Lithography; Photonic crystals; Proximity effects; Resists; Silicon; Solid modeling; Photonic crystal; lithography; proximity effect;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-4673-2517-2
DOI :
10.1109/EDM.2012.6310185
