DocumentCode
3423542
Title
Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition
Author
Deladi, S. ; Tas, N.R. ; Berenschot, J.W. ; de Boer, J.H. ; de Boer, M.J. ; Krijnen, G.J.M. ; Elwenspoek, M.C.
Author_Institution
MESA+ Res. Inst., Twente Univ., Enschede, Netherlands
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
564
Lastpage
567
Abstract
We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.
Keywords
atomic force microscopy; electrodeposition; electrolytes; microfluidics; micromachining; probes; 250 nm; 3 nm; atomic force microscope; cantilevers; electrical circuit; electrical current; electrolyte solution; fluid transfer; fluidic channels; fluidic reservoir; micromachined fountain pen; nanoelectrochemical metal deposition; pyramidal probe; Atomic force microscopy; Atomic layer deposition; Chemicals; Circuits; Fabrication; Fluid flow; Fluidic microsystems; Instruments; Probes; Reservoirs;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453992
Filename
1453992
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