Multiphysical analysis of moving-magnet planar motor topologies

Author

Rovers, J.M.M. ; Jansen, J.W. ; Lomonova, E.A.

Author_Institution

Dept. of Electr. Eng,, Electromech. & Power Electron. Group, Eindhoven Univ. of Technol., Eindhoven, Netherlands

Volume

49

Issue

12

fYear

2013

fDate

Dec. 2013

Firstpage

5730

Lastpage

5741

Abstract

Moving-magnet magnetically levitated planar motors are considered for use as a wafer stage in the semiconductor lithographic industry. This puts high requirements on the accuracy and the dissipated power and cooling performance of such motors. The goal of this paper is to analyze the multi-physical behavior of three moving-magnet planar topologies using an electromagnetic model, a mechanical model, and a thermal model. This behavior is evaluated using a trajectory and performance criteria which are representative for the application. The static and dynamic behavior are evaluated.

Keywords

linear motors; magnetic cooling; magnetic levitation; cooling performance; dynamic behavior; electromagnetic model; mechanical model; moving-magnet magnetic levitated planar motor topology; multiphysical analysis; multiphysical behavior; performance criteria; power performance; semiconductor lithographic industry; static behavior; thermal model; trajectory criteria; wafer stage; Acceleration; Coils; Cooling; Force; Magnetic levitation; Planar motors; Topology; Electromagnetic modeling; mechanical modeling; planar actuators; thermal modeling;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2013.2273060

Filename

6557499