DocumentCode
3423913
Title
A dual axis gas gyroscope utilizing low-doped silicon thermistor
Author
Dau, V.T. ; Shiozawa, T. ; Dao, D.V. ; Kumagai, H. ; Sugiyama, S.
Author_Institution
Dept. of Microsystem Technol., Ritsumeikan Univ., Kyoto, Japan
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
626
Lastpage
629
Abstract
This paper presents the design, simulation and fabrication of a dual axis semiconductor gas gyroscope. The sensor configuration consists of a piezoelectric pump and a micro thermal sensing element, packaged in an aluminum case with diameter and length of 14mm and 25mm, respectively. Good agreement between the sensitivity simulation results and the experimental data has been realized. This sensor is to be applied in ship anti-rolling and stabilization systems.
Keywords
gyroscopes; micromechanical devices; sensors; ships; silicon; thermistors; 14 mm; 25 mm; dual-axis gas gyroscope; low-doped silicon thermistor; micro thermal sensing element; piezoelectric pump; semiconductor gas gyroscope; ship anti-rolling system; ship stabilization systems; Acceleration; Fabrication; Fluid flow; Fluid flow measurement; Gyroscopes; Micromechanical devices; Packaging; Silicon; Thermistors; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1454007
Filename
1454007
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