DocumentCode
3423930
Title
Mechanical noise-limited CMOS-MEMS accelerometers
Author
Tsai, Julius M. ; Fedder, Gary K.
Author_Institution
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
630
Lastpage
633
Abstract
The latest generation of CMOS-MEMS accelerometer has measured mechanical Brownian noise-limited resolution of 45 μg/√(Hz) at 1 atm. A modified pre-amplifier design with sub-threshold transistor dc biasing is robust against leakage paths to positive and negative supplies and has an input referred noise of 14.6 nV/√(Hz) at the 2 MHz modulation frequency. The accelerometer proof mass is purposely sized to have equivalent mechanical Brownian noise. An array approach to improve the noise floor further is proposed and fabricated.
Keywords
CMOS integrated circuits; accelerometers; micromechanical devices; 2 MHz; CMOS-MEMS accelerometers; accelerometer proof mass; input referred noise; leakage paths; mechanical Brownian noise; mechanical Brownian noise-limited resolution; pre-amplifier design; sub-threshold transistor dc biasing; Accelerometers; Bandwidth; Circuit noise; Etching; Fingers; Foundries; Micromechanical devices; Noise robustness; Silicon; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1454008
Filename
1454008
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