Title :
Mechanical noise-limited CMOS-MEMS accelerometers
Author :
Tsai, Julius M. ; Fedder, Gary K.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
The latest generation of CMOS-MEMS accelerometer has measured mechanical Brownian noise-limited resolution of 45 μg/√(Hz) at 1 atm. A modified pre-amplifier design with sub-threshold transistor dc biasing is robust against leakage paths to positive and negative supplies and has an input referred noise of 14.6 nV/√(Hz) at the 2 MHz modulation frequency. The accelerometer proof mass is purposely sized to have equivalent mechanical Brownian noise. An array approach to improve the noise floor further is proposed and fabricated.
Keywords :
CMOS integrated circuits; accelerometers; micromechanical devices; 2 MHz; CMOS-MEMS accelerometers; accelerometer proof mass; input referred noise; leakage paths; mechanical Brownian noise; mechanical Brownian noise-limited resolution; pre-amplifier design; sub-threshold transistor dc biasing; Accelerometers; Bandwidth; Circuit noise; Etching; Fingers; Foundries; Micromechanical devices; Noise robustness; Silicon; Transducers;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1454008
