DocumentCode
3424405
Title
Challenges in MEMS parametric macro-modeling based on mode superposition technique
Author
Kolchuzhin, Vladimir ; Dötzel, Wolfram ; Mehner, Jan
Author_Institution
Dept. of Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz
fYear
2009
fDate
26-29 April 2009
Firstpage
1
Lastpage
4
Abstract
Computational approaches, opportunities and challenges in reduced order modelling based on mode superposition method of the coupled electrostatic-structural domains, including effective model generation and geometrical parameterization, as well as physical and system design of MEMS component are presented and discussed.
Keywords
micromechanical devices; MEMS component design; MEMS parametric macromodeling; coupled electrostatic-structural domain; mode superposition technique; Capacitance; Capacitive sensors; Circuit simulation; Computational modeling; Electrostatics; Micromechanical devices; Quantum computing; Read only memory; Residual stresses; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on
Conference_Location
Delft
Print_ISBN
978-1-4244-4160-0
Electronic_ISBN
978-1-4244-4161-7
Type
conf
DOI
10.1109/ESIME.2009.4938481
Filename
4938481
Link To Document