The dynamic model of electrostatic torsion mirror with pull-in consideration for multiphysics behavior anticipation

Author

Yi, Yuheon ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo, Tokyo

fYear

2009

fDate

26-29 April 2009

Firstpage

1

Lastpage

6

Abstract

This study presents a newly developed dynamic model established by MATLAB Simulink that can handle post pull-in behavior of MEMS electrostatic torsional mirror. In addition to the conventional MATLAB Simulink model of the quadratic oscillation system, a mathematical model of displacement limiter has been inserted to represent the pull-in effect in dynamic analysis. Due to the modification, the model has become applicable to both pre- and post pull-in region of electrostatic actuators. Electrical circuits from the MATLAB Simulink library can be combined with the mechanical model and simulated to see multiphysics behavior. The new model has been integrated in the simulation model of self-oscillating MEMS system which has CMOS logics, and the versatility in the behavior-level simulation has been verified.

Keywords

CMOS integrated circuits; circuit oscillations; micromechanical devices; oscillators; CMOS logics; MATLAB Simulink library; MATLAB Simulink model; MEMS electrostatic torsional mirror; behavior-level simulation; complementary metal-oxide-semiconductor; displacement limiter; dynamic analysis; dynamic model; electrical circuits; electrostatic actuators; electrostatic torsion mirror; mathematical model; mechanical model; microelectromechanical system; multiphysics behavior anticipation; pull-in consideration; quadratic oscillation system; self-oscillating MEMS system; simulation model; versatility; Analytical models; CMOS image sensors; CMOS logic circuits; Circuit simulation; Electrostatic actuators; MATLAB; Mathematical model; Micromechanical devices; Mirrors; Semiconductor device modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on

Conference_Location

Delft

Print_ISBN

978-1-4244-4160-0

Electronic_ISBN

978-1-4244-4161-7

Type

conf

DOI

10.1109/ESIME.2009.4938488

Filename

4938488