Title :
Bulk and surface acoustic wave transduction in sputtered lead zirconate titanate thin films
Author :
Sreenivas, K. ; Sayer, M. ; Jen, C.K. ; Yamanaka, K.
Author_Institution :
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Abstract :
Piezoelectricity of lead zirconate titanate (PZT) thin films has been successfully obtained. The films were fabricated by reactive sputtering of a composite metal target. They were found to possess good ferroelectric and dielectric properties. Two poling configurations were used. Bulk and surface acoustic wave measurements using poled PZT films are presented. Scanning acoustic microscope images and V(z ) curves obtained at 775 MHz were used to characterize these thin films
Keywords :
lead compounds; piezoelectric transducers; sputtered coatings; surface acoustic wave devices; thin film devices; zirconium compounds; 775 MHz; PZT; PbZrO3TiO3; SAW transduction; bulk acoustic wave measurements; bulk acoustic wave transduction; composite metal target; dielectric properties; ferroelectric properties; piezoelectricity; reactive sputtering; scanning acoustic microscope images; surface acoustic wave measurements; thin films; Acoustic measurements; Acoustic waves; Dielectric thin films; Ferroelectric films; Ferroelectric materials; Piezoelectric films; Piezoelectricity; Sputtering; Surface acoustic waves; Titanium compounds;
Conference_Titel :
Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.1988.49385
