• DocumentCode
    3424865
  • Title

    Silicon based nano lead for single cell recording

  • Author

    Shuzo, M. ; Arai, H. ; Kanzaki, R. ; Shimoyama, I.

  • Author_Institution
    Graduate Sch. of Inf. Sci. & Technol., Tokyo Univ., Japan
  • fYear
    2005
  • fDate
    30 Jan.-3 Feb. 2005
  • Firstpage
    766
  • Lastpage
    769
  • Abstract
    In this paper "nano lead" is defined as a submicron scale electrode for recording a neural activity from a single cell. The nano lead was fabricated with the technique of EB direct writing, DRIE, and FIB. The tiny recording site of the nano lead made very high electrode impedance at the low frequency, 100 MΩ at 100 Hz and 500 MΩ at DC. It caused the base line of the nerve potential unstable, but the IPSP signals of Aplysia were measured clearly.
  • Keywords
    biomolecular electronics; lead; microelectrodes; nanotechnology; neural nets; recorders; silicon; 100 Hz; Aplysia; DC; DRIE; EB direct writing; FIB; IPSP signal; Pb; Si; electrode impedance; nerve potential base line; neural activity; recording site; silicon based nano lead; single cell recording; submicron scale electrode; Electrodes; Etching; Fabrication; Glass; Lead; Neurons; Resists; Sea measurements; Silicon; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-8732-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2005.1454042
  • Filename
    1454042