DocumentCode
3425001
Title
On-chip temperature gradient liquid chromatography
Author
Shih, C.Y. ; Chen, Y. ; Xie, J. ; He, Q. ; Tai, Y.C.
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
782
Lastpage
785
Abstract
We report here the first MEMS temperature-programmable high pressure parylene column with integrated thermal isolation and electrochemical sensor for on-chip temperature gradient liquid chromatography. Two sets of devices for different high performance liquid chromatography (HPLC) criteria were fabricated. The separation and detection of derivatized amino acids sample was successfully demonstrated. Compared with other temperature gradient HPLC systems which use "macro oven" to generate temporal temperature gradient in the column, our device\´s thermal performance is greatly improved by orders of magnitude without the sacrifice of chromatography quality.
Keywords
chromatography; electrochemical sensors; micromechanical devices; proteins; thermal engineering; HPLC device fabrication; MEMS temperature-programmable high pressure parylene column; derivatized amino acid sample; electrochemical sensor; high performance liquid chromatography; integrated thermal isolation; on-chip temperature gradient liquid chromatography; thermal performance; Amino acids; Fabrication; Helium; Micromechanical devices; Resists; Silicon; Temperature control; Temperature sensors; Thermal conductivity; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1454046
Filename
1454046
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