A PVDF based 3D force sensor for micro and nano manipulation

The existing methods of measuring micro or nano level forces in biomanipulation applications are only limited to one or two dimensions and are not sufficient to give a precise force reading. In this paper a unique 3D force sensor for exceptionally precise force measurement has been proposed for a range of applications. The goal is to fabricate a sensor using SU-8 coupled with commercially available and cheap polyvinylidene fluoride (PVDF) film for maximum accuracy. Furthermore, to improve the mechanical stiffness and to make the sensor biocompatible, the PVDF is coated with parylene. The design of this unique proposed 3D sensor will open a new way of precisely measuring 3D force in many micro and nano applications, including providing force feedback for haptic device in microinjection.