Title :
System of determination of electro - physical, physical - Chemical properties and gas - sensitive characteristics of semiconductor layers of oxides in frequency area
Author :
Poluyanovich, Nikolay K. ; Dubyago, Marina N. ; Matsiborko, Vladimir V.
Author_Institution :
Taganrog Inst. of Technol., Southern Fed. Univ., Taganrog, Russia
Abstract :
The installation for determination of electro-physical and physical - chemical properties of gas - sensitive materials (GSM) by means of measurement of electric parameters of an equivalent electric circuit was developed. Installation, for measurement of an electric impedance on frequencies by 1 MHz in a range of 100 Ohm ... 5 mega ohms is described . Stages of research of gas -sensitive properties of nano - composite materials and processes proceeding in them, for selection of the best GSM for gas sensors are described. Structures of impedance models are offered and prospects of their use for gas sensors are proved.
Keywords :
electric impedance measurement; gas sensors; nanocomposites; nanoelectromechanical devices; semiconductor materials; chemical properties; electric impedance measurement; electric parameter measurement; electrophysical properties; equivalent electric circuit; frequency 1 MHz; gas sensors; gas-sensitive materials; impedance models; nanocomposite materials; semiconductor layers; Chemicals; Films; GSM; Gas detectors; Impedance; Resistance; a gas - sensitive element; a method of impedance spectroscopy; electro - physical properties; the device;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-4673-2517-2
DOI :
10.1109/EDM.2012.6310269
