DocumentCode
3425837
Title
The Tenth Annual International Workshop On Micro Electro Mechanical Systems An Investigation Of Micro Structures, Sensors, Actuators, Machines And Robots
fYear
1997
fDate
26-30 Jan. 1997
Abstract
Conference proceedings front matter may contain various advertisements, welcome messages, committee or program information, and other miscellaneous conference information. This may in some cases also include the cover art, table of contents, copyright statements, title-page or half title-pages, blank pages, venue maps or other general information relating to the conference that was part of the original conference proceedings.
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location
Nagoya, Japan
ISSN
1084-6999
Print_ISBN
0-7803-3744-1
Type
conf
DOI
10.1109/MEMSYS.1997.581728
Filename
581728
Link To Document