• DocumentCode
    3425837
  • Title

    The Tenth Annual International Workshop On Micro Electro Mechanical Systems An Investigation Of Micro Structures, Sensors, Actuators, Machines And Robots

  • fYear
    1997
  • fDate
    26-30 Jan. 1997
  • Abstract
    Conference proceedings front matter may contain various advertisements, welcome messages, committee or program information, and other miscellaneous conference information. This may in some cases also include the cover art, table of contents, copyright statements, title-page or half title-pages, blank pages, venue maps or other general information relating to the conference that was part of the original conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
  • Conference_Location
    Nagoya, Japan
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-3744-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1997.581728
  • Filename
    581728