High-order micromechanical electronic filters

Author

Wang, Kun ; Nguyen, Clark T C

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

fYear

1997

fDate

26-30 Jan 1997

Firstpage

25

Lastpage

30

Abstract

Third-order, micromechanical bandpass filters comprised of three folded-beam resonators coupled by flexural mode springs are demonstrated using an IC-compatible, polysilicon surface-micromachining technology. The use of quarter-wavelength coupling beams attached to resonators at their folding-trusses is shown to suppress passband distortion due to finite-mass nonidealities, which become increasingly important on this micro-scale. A balanced, 300 kHz, prototype, three-resonator micromechanical filter is demonstrated with filter Q=590 and stopband rejection greater than 38 dB

Keywords

band-pass filters; elemental semiconductors; ladder filters; micromachining; micromechanical resonators; network synthesis; silicon; 300 kHz; Si; bandpass filters; flexural mode springs; folded-beam resonators; micromechanical electronic filters; passband distortion; polysilicon surface-micromachining; quarter-wavelength coupling beams; stopband rejection; Band pass filters; Bandwidth; Coupling circuits; Frequency; Micromechanical devices; Passband; Prototypes; Q factor; Resonator filters; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581759

Filename

581759