Title :
Near field optics for nanometric sensing and control
Author_Institution :
Dept. of Appl. Phys., Osaka Univ., Japan
Abstract :
It has been believed that one of the major reasons for the popularity of optical sensing is its non-destructive and remote-sensing capability. We can measure an object remotely far from the sensor without any damage to the object. However, in the near-field optical sensing which is described in this presentation a probe is nearly in contact to the object in a distance of some nanometers. While near-field optics loses the merit of remotely accessible capability with ordinary optics, it has significant advantages of super-resolving imaging, field-enhanced sensing and control, and nanometric surface fabrication. These advantages enable optics for contributing to the advanced micro-electro-mechanical systems. In this presentation, I describe the principle of this near-field optical sensing and control, with some latest experimental examples. The research of the near-field optics is still now progressing as an advanced optical technology, coupled with the related high technologies such as very precise mechanical scanner, nanometric fabrication, and very high-sensitive photodetection
Keywords :
laser beam machining; micromachining; nanotechnology; optical microscopy; optical sensors; surface plasmons; evanescent photon; field-enhanced sensing; mechanical scanner; microelectromechanical systems; nanometric fabrication; nanometric sensing; nanometric surface fabrication; near field optics; near-field optical sensing; nondestructive sensing; photodetection; remote-sensing; super-resolving imaging; Holographic optical components; Holography; Nonlinear optics; Optical attenuators; Optical control; Optical refraction; Optical sensors; Optical surface waves; Optical variables control; Spectroscopy;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581761