Title :
A micro-machined microwave antenna integrated with its electrostatic spatial scanning
Author :
Chauvel, Dominique ; Haese, Nathalie ; Rolland, Paul-Alain ; Collard, Dominique ; Fujita, Hiroyuki
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
This paper proposes an original actuator designed for microwave applications. A microstrip antenna is patterned on a micromachined fused quartz structure that can rotate to perform the spatial scanning of the emitted microwave beam. Both measured mechanical and microwave characteristics provide this device with the ability to open new application field of MEMS in detection and wireless communication
Keywords :
antenna accessories; integrated circuit technology; microactuators; microstrip antennas; quartz; ANSYS; FEM; MEMS; SiO2; automotive applications; electrostatic spatial scanning; emitted microwave beam; mechanical characteristics; micromachined fused quartz structure; micromachined microwave antenna; microstrip antenna; microwave applications; microwave characteristics; spatial scanning; wireless communication; Chromium; Electrodes; Electrostatics; Fasteners; Gold; Microstrip antennas; Microwave antennas; Microwave devices; Silicon; Wet etching;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581774
