A micro-machined microwave antenna integrated with its electrostatic spatial scanning

Author

Chauvel, Dominique ; Haese, Nathalie ; Rolland, Paul-Alain ; Collard, Dominique ; Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

fYear

1997

fDate

26-30 Jan 1997

Firstpage

84

Lastpage

89

Abstract

This paper proposes an original actuator designed for microwave applications. A microstrip antenna is patterned on a micromachined fused quartz structure that can rotate to perform the spatial scanning of the emitted microwave beam. Both measured mechanical and microwave characteristics provide this device with the ability to open new application field of MEMS in detection and wireless communication

Keywords

antenna accessories; integrated circuit technology; microactuators; microstrip antennas; quartz; ANSYS; FEM; MEMS; SiO₂; automotive applications; electrostatic spatial scanning; emitted microwave beam; mechanical characteristics; micromachined fused quartz structure; micromachined microwave antenna; microstrip antenna; microwave applications; microwave characteristics; spatial scanning; wireless communication; Chromium; Electrodes; Electrostatics; Fasteners; Gold; Microstrip antennas; Microwave antennas; Microwave devices; Silicon; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581774

Filename

581774