DocumentCode :
3426736
Title :
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
fYear :
1997
fDate :
26-30 Jan. 1997
Firstpage :
96
Abstract :
The folowing topics are dealt with: microsystems; microactuators; microsensors; optical applications; fluidics; fabrication technologies; packaging; design and modelling; and micromachined material properties
Keywords :
etching; fluidic devices; microactuators; micromachining; micromechanical devices; microsensors; packaging; fabrication technologies; fluidics; microactuators; micromachined material properties; micromachines; microsensors; microstructures; microsystems; modelling; optical applications; packaging;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya, Japan
ISSN :
1084-6999
Print_ISBN :
0-7803-3744-1
Type :
conf
DOI :
10.1109/MEMSYS.1997.581778
Filename :
581778
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3426736
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