Title :
A CAD tool for optical MEMS
Author :
Kurzweg, Timothy P. ; Levitan, Steven P. ; Marchand, Philippe J. ; Martinez, Jose A. ; Prough, Kurt R. ; Chiarulli, Donald M.
Author_Institution :
Dept. of Electr. Eng., Pittsburgh Univ., PA, USA
Abstract :
Chatoyant models free-space opto-electronic components and systems and performs simulations and analyses that allow designers to make informed system level trade-offs. Recently, the use of MEM bulk and surface micro-machining technology has enabled the fabrication of micro-optical-mechanical systems. This paper presents our models for diffractive optics and new analysis techniques which extend Chatoyant to support optical MEMS design. We show these features in the simulation of two optical MEM systems
Keywords :
electronic design automation; light diffraction; micro-optics; micromachining; micromechanical devices; CAD tool; Chatoyant; MEMS design; MOEMS; diffractive optics; free-space opto-electronic components; micro-machining technology; micro-optical-mechanical systems; optical MEMS; system level trade-offs; Analytical models; Design automation; Micromechanical devices; Optical design techniques; Optical feedback; Optical interconnections; Optical modulation; Optical sensors; Performance analysis; Signal design;
Conference_Titel :
Design Automation Conference, 1999. Proceedings. 36th
Conference_Location :
New Orleans, LA
Print_ISBN :
1-58113-092-9
DOI :
10.1109/DAC.1999.782204
