A CAD tool for optical MEMS

Author

Kurzweg, Timothy P. ; Levitan, Steven P. ; Marchand, Philippe J. ; Martinez, Jose A. ; Prough, Kurt R. ; Chiarulli, Donald M.

Author_Institution

Dept. of Electr. Eng., Pittsburgh Univ., PA, USA

fYear

1999

fDate

1999

Firstpage

879

Lastpage

884

Abstract

Chatoyant models free-space opto-electronic components and systems and performs simulations and analyses that allow designers to make informed system level trade-offs. Recently, the use of MEM bulk and surface micro-machining technology has enabled the fabrication of micro-optical-mechanical systems. This paper presents our models for diffractive optics and new analysis techniques which extend Chatoyant to support optical MEMS design. We show these features in the simulation of two optical MEM systems

Keywords

electronic design automation; light diffraction; micro-optics; micromachining; micromechanical devices; CAD tool; Chatoyant; MEMS design; MOEMS; diffractive optics; free-space opto-electronic components; micro-machining technology; micro-optical-mechanical systems; optical MEMS; system level trade-offs; Analytical models; Design automation; Micromechanical devices; Optical design techniques; Optical feedback; Optical interconnections; Optical modulation; Optical sensors; Performance analysis; Signal design;

fLanguage

English

Publisher

ieee

Conference_Titel

Design Automation Conference, 1999. Proceedings. 36th

Conference_Location

New Orleans, LA

Print_ISBN

1-58113-092-9

Type

conf

DOI

10.1109/DAC.1999.782204

Filename

782204