DocumentCode :
3426892
Title :
Modeling and analysis of the coupling effect for one kind of coarse-fine stages
Author :
Yibo, Yang ; Wensheng, Yin ; Yu, Zhu
Author_Institution :
Precision Instrum. & Mechanology Inst., Tsinghua Univ., Beijing, China
fYear :
2009
fDate :
9-11 Dec. 2009
Firstpage :
2011
Lastpage :
2014
Abstract :
Coarse-fine structure makes the stages achieve long stroke and high precision performance easier than single drivers. So this structure is wide adopted in precision motion stages, which will be used in precision manufacturing, biology equipment and hard disk drivers. Most published work on coarse-fine stages modeling has been concentrated on the theory modeling or single input single output (SISO) identification in which coupling effect was neglected. In this paper, a new kind of coarse-fine stages was studied. Firstly, the structure and relevant dynamic behavior of the stages are described and modeled. Secondly, multi-input multi-output (MIMO) identification was done in a test coarse-fine stages. Thirdly, some experiments have been done to show the coupling effect. Finally we will give an analysis result about when should we consider the coupling effect of this kind of coarse-fine stages.
Keywords :
MIMO systems; servomotors; biology equipment; coarse-fine stages modeling; coarse-fine structure; coupling effect; hard disk drivers; multi-input multi-output identification; precision manufacturing; precision motion stages; single input single output identification; Automatic control; Bandwidth; Biological system modeling; Hard disks; Instruments; MIMO; Manufacturing; Rotors; Semiconductor device manufacture; Stators;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Control and Automation, 2009. ICCA 2009. IEEE International Conference on
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4706-0
Electronic_ISBN :
978-1-4244-4707-7
Type :
conf
DOI :
10.1109/ICCA.2009.5410323
Filename :
5410323
Link To Document :
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