Modeling and analysis of the coupling effect for one kind of coarse-fine stages

Coarse-fine structure makes the stages achieve long stroke and high precision performance easier than single drivers. So this structure is wide adopted in precision motion stages, which will be used in precision manufacturing, biology equipment and hard disk drivers. Most published work on coarse-fine stages modeling has been concentrated on the theory modeling or single input single output (SISO) identification in which coupling effect was neglected. In this paper, a new kind of coarse-fine stages was studied. Firstly, the structure and relevant dynamic behavior of the stages are described and modeled. Secondly, multi-input multi-output (MIMO) identification was done in a test coarse-fine stages. Thirdly, some experiments have been done to show the coupling effect. Finally we will give an analysis result about when should we consider the coupling effect of this kind of coarse-fine stages.