DocumentCode
3427073
Title
3C-SiC coating of silicon micromachined atomizers
Author
Rajan, Niju ; Zorman, C. ; Mehregany, M. ; DeAnna, R. ; Harvey, R.
Author_Institution
Microfabrication Lab., Case Western Reserve Univ., Cleveland, OH, USA
fYear
1997
fDate
26-30 Jan 1997
Firstpage
165
Lastpage
168
Abstract
This paper presents a study of 3C-silicon carbide (3C-SiC) coating on the flow surfaces of silicon micromachined atomizers. There are two important aspects to this study. Firstly, it demonstrates that SiC coating significantly enhances several elements of the performance of Si micromachined atomisers. Secondly, it shows that conformal deposition of 3C-SiC on high aspect ratio mechanical structures is attainable with the APCVD process described below
Keywords
chemical vapour deposition; conformal coatings; elemental semiconductors; gas turbines; masks; micromechanical devices; silicon; silicon compounds; sprays; wear resistant coatings; 3C-SiC coating; APCVD; Si; Si micromachined atomisers; SiC coating; SiC deposition; SiC polytypes; SiC-Si; conformal deposition; flow surfaces; gas turbine engines; protective coating; Atomic layer deposition; Coatings; Etching; Fuels; Orifices; Shape; Silicon carbide; Spraying; Surface morphology; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location
Nagoya
ISSN
1084-6999
Print_ISBN
0-7803-3744-1
Type
conf
DOI
10.1109/MEMSYS.1997.581793
Filename
581793
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