Two-photon-absorbed photopolymerization for three-dimensional microfabrication

Author

Maruo, Shoji ; Kawata, Satoshi

Author_Institution

Dept. of Appl. Phys., Osaka Univ., Japan

fYear

1997

fDate

26-30 Jan 1997

Firstpage

169

Lastpage

174

Abstract

We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An experimental system for the microfabrication has been developed with a Ti:sapphire laser that has an oscillating wavelength as 770 nm and a 130 fs pulse width. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate monomers and urethane acrylate oligomers

Keywords

micromechanical devices; optical focusing; optical pumping; polymerisation; solid lasers; two-photon processes; 130 fs; 770 nm; Al₂O₃:Ti; Ti:sapphire laser; microstructure; oscillating wavelength; photoinitiators; resin; three-dimensional microfabrication; two-photon absorption; two-photon-absorbed photopolymerization; urethane acrylate monomers; urethane acrylate oligomers; Electromagnetic wave absorption; Laser beams; Laser theory; Lenses; Optical device fabrication; Optical pulses; Physics; Resins; Shape; Space vector pulse width modulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581794

Filename

581794