DocumentCode
3427455
Title
Electrostriction of polymer films for microactuators
Author
Pelrine, Ron ; Kornbluh, Roy ; Joseph, Jose ; Chiba, Seiki
Author_Institution
SRI Int., Menlo Park, CA, USA
fYear
1997
fDate
26-30 Jan 1997
Firstpage
238
Lastpage
243
Abstract
The investigation of electrostrictive polymers (EPs) as a means of microactuation is described. EP materials are squeezed and stretched by electrostatic forces generated with compliant electrodes. This approach offers several advantages over existing actuator technologies, including high strains (>30%), good actuation pressures (1.9 MPa), and high specific energy densities (0.1 J/g). In addition, the actuation is fast, uses lightweight materials, and has the potential for high energy efficiencies. Although EP actuators are electrostatics based, they offer 5 to 20 times the effective actuation pressure of conventional air-gap electrostatics at the same electric field strength. The gain is due to replacing air with a higher dielectric material, and to using two orthogonal modes of electromechanical coupling (stretching and squeezing) rather than one. Analysis of the mechanism of EP actuation is discussed. We also discuss fabrication techniques such as spin coating, casting, and dipping, as well as polymer and electrode materials. We describe demonstrations of prototype mini- and microactuators in a variety of configurations such as stretched films, stacks, rolls, tubes, and unimorphs. Last, we suggest potential applications of the technology in areas such as microrobots, sound generators, and displays
Keywords
electrostriction; microactuators; polymer films; 1.9 MPa; actuation pressures; air-gap electrostatics; casting; compliant electrodes; dielectric material; dipping; displays; electric field strength; electrode materials; electromechanical coupling; electrostatic forces; electrostrictive polymers; fabrication; lightweight materials; microactuators; microrobots; miniactuators; orthogonal modes; polymer films; sound generators; spin coating; squeezing; stretching; Actuators; Capacitive sensors; Dielectric materials; Electrodes; Electrostatics; Electrostriction; Energy efficiency; Microactuators; Polymer films; Potential energy;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location
Nagoya
ISSN
1084-6999
Print_ISBN
0-7803-3744-1
Type
conf
DOI
10.1109/MEMSYS.1997.581811
Filename
581811
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