• DocumentCode
    3427455
  • Title

    Electrostriction of polymer films for microactuators

  • Author

    Pelrine, Ron ; Kornbluh, Roy ; Joseph, Jose ; Chiba, Seiki

  • Author_Institution
    SRI Int., Menlo Park, CA, USA
  • fYear
    1997
  • fDate
    26-30 Jan 1997
  • Firstpage
    238
  • Lastpage
    243
  • Abstract
    The investigation of electrostrictive polymers (EPs) as a means of microactuation is described. EP materials are squeezed and stretched by electrostatic forces generated with compliant electrodes. This approach offers several advantages over existing actuator technologies, including high strains (>30%), good actuation pressures (1.9 MPa), and high specific energy densities (0.1 J/g). In addition, the actuation is fast, uses lightweight materials, and has the potential for high energy efficiencies. Although EP actuators are electrostatics based, they offer 5 to 20 times the effective actuation pressure of conventional air-gap electrostatics at the same electric field strength. The gain is due to replacing air with a higher dielectric material, and to using two orthogonal modes of electromechanical coupling (stretching and squeezing) rather than one. Analysis of the mechanism of EP actuation is discussed. We also discuss fabrication techniques such as spin coating, casting, and dipping, as well as polymer and electrode materials. We describe demonstrations of prototype mini- and microactuators in a variety of configurations such as stretched films, stacks, rolls, tubes, and unimorphs. Last, we suggest potential applications of the technology in areas such as microrobots, sound generators, and displays
  • Keywords
    electrostriction; microactuators; polymer films; 1.9 MPa; actuation pressures; air-gap electrostatics; casting; compliant electrodes; dielectric material; dipping; displays; electric field strength; electrode materials; electromechanical coupling; electrostatic forces; electrostrictive polymers; fabrication; lightweight materials; microactuators; microrobots; miniactuators; orthogonal modes; polymer films; sound generators; spin coating; squeezing; stretching; Actuators; Capacitive sensors; Dielectric materials; Electrodes; Electrostatics; Electrostriction; Energy efficiency; Microactuators; Polymer films; Potential energy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
  • Conference_Location
    Nagoya
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-3744-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1997.581811
  • Filename
    581811