DocumentCode
3427698
Title
A fully integrated CMOS-MEMS pressure sensor with on-chip Δ-Σ analog-to-digital converter
Author
Wisland, Dag T. ; øysted, Kurianne
Author_Institution
Dept. of Informatics, Oslo Univ., Norway
fYear
2004
fDate
1-3 Dec. 2004
Abstract
This paper describes a fully integrated CMOS-MEMS pressure sensor implemented in a standard 0.6 μm process from AMS. The fabricated chip includes all necessary components from pressure sensor to A/D-converter and decimation filter. The pressure sensitive diaphragm is fabricated using one single postprocessing step. Theoretical background is provided along with simulated results laying the fundament for the implemented CMOS design. Measured results will be available in short time.
Keywords
CMOS integrated circuits; biomedical engineering; filters; microsensors; pressure sensors; sigma-delta modulation; decimation filter; fully integrated CMOS-MEMS pressure sensor; on-chip Δ-Σ analog-to-digital converter; Analog-digital conversion; Delay; Frequency modulation; Intrusion detection; Inverters; MOSFETs; Piezoresistance; Ring oscillators; Silicon; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Biomedical Circuits and Systems, 2004 IEEE International Workshop on
Print_ISBN
0-7803-8665-5
Type
conf
DOI
10.1109/BIOCAS.2004.1454157
Filename
1454157
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