Title :
An electrostatic microresonant power conversion device
Author :
Noworolski, J. Mark ; Sanders, Seth R.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fDate :
29 Jun-3 Jul 1992
Abstract :
An electrostatically driven microstructure suitable for use in a monolithic resonant DC-DC converter is presented. The device can be manufactured using existing integrated circuit processing techniques, permitting integration with, switching devices in silicon. The mechanical resonant structure is used in place of an LC tank and in place of a transformer, avoiding the complexity of manufacturing integrated magnetic elements. A monolithic resonant converter using this technology offering high power density is proposed. The device can potentially be driven in a zero-voltage-switched (ZVS) mode, scaling well to higher operating frequencies
Keywords :
electrostatic devices; monolithic integrated circuits; power convertors; switching circuits; electrostatic microresonant power conversion device; high power density; integrated circuit processing techniques; mechanical resonant structure; monolithic resonant DC-DC converter; silicon; switching devices; zero-voltage-switched; DC-DC power converters; Electrostatics; Integrated circuit manufacture; Integrated circuit technology; Magnetic resonance; Manufacturing processes; Microstructure; Power conversion; Silicon; Switching circuits;
Conference_Titel :
Power Electronics Specialists Conference, 1992. PESC '92 Record., 23rd Annual IEEE
Conference_Location :
Toledo
Print_ISBN :
0-7803-0695-3
DOI :
10.1109/PESC.1992.254775
