An electrostatic microresonant power conversion device

Author

Noworolski, J. Mark ; Sanders, Seth R.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

1992

fDate

29 Jun-3 Jul 1992

Firstpage

997

Abstract

An electrostatically driven microstructure suitable for use in a monolithic resonant DC-DC converter is presented. The device can be manufactured using existing integrated circuit processing techniques, permitting integration with, switching devices in silicon. The mechanical resonant structure is used in place of an LC tank and in place of a transformer, avoiding the complexity of manufacturing integrated magnetic elements. A monolithic resonant converter using this technology offering high power density is proposed. The device can potentially be driven in a zero-voltage-switched (ZVS) mode, scaling well to higher operating frequencies

Keywords

electrostatic devices; monolithic integrated circuits; power convertors; switching circuits; electrostatic microresonant power conversion device; high power density; integrated circuit processing techniques; mechanical resonant structure; monolithic resonant DC-DC converter; silicon; switching devices; zero-voltage-switched; DC-DC power converters; Electrostatics; Integrated circuit manufacture; Integrated circuit technology; Magnetic resonance; Manufacturing processes; Microstructure; Power conversion; Silicon; Switching circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Electronics Specialists Conference, 1992. PESC '92 Record., 23rd Annual IEEE

Conference_Location

Toledo

Print_ISBN

0-7803-0695-3

Type

conf

DOI

10.1109/PESC.1992.254775

Filename

254775