Title :
Full chip optical imaging of logic state evolution in CMOS circuits
Author :
Kash, J.A. ; Tsang, J.C.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
Measuring the logic state switching of individual devices in present and future sub-micron scale CMOS circuits poses substantial challenges. Here we show that hot electron light emission is generated as a subnanosecond pulse coincident with the normal switching of each individual FET in a CMOS circuit. This emission can be used to directly measure the propagation of signals through the individual gates in fully-functional CMOS circuits.
Keywords :
CMOS logic circuits; hot carriers; integrated circuit testing; logic testing; CMOS circuit; FET; full chip optical imaging; hot electron light emission; logic state switching; signal propagation measurement; subnanosecond pulse; CMOS logic circuits; Electron emission; FETs; Logic devices; Optical imaging; Optical propagation; Optical pulse generation; Pulse circuits; Semiconductor device measurement; Switching circuits;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.554133
