Trade-offs in temperature control of fast-ramp RTP systems

Author

De Roover, Dick ; Devasia, Santoshd

Author_Institution

SC Solutions Inc., Santa Clara, CA, USA

Volume

1

fYear

1999

fDate

1999

Firstpage

76

Abstract

Trade-offs in temperature control of fast-ramp rapid thermal processing (RTP) systems from an open-loop optimal input point of view are investigated. Exact tracking of fast ramps with rates such as 250°C/sec is usually not possible if other constraints, like actuator saturation and/or limited temperature overshoot, have to be met. A recently developed trajectory redesign technique allows to trade-off exact tracking versus other limitations in an optimal way. Application of this technique to a model of a generic RTP system exemplifies the possibilities and limitations of fast-ramping temperature control

Keywords

control system synthesis; optimal control; process control; rapid thermal processing; semiconductor device manufacture; temperature control; actuator saturation; fast-ramp RTP systems; limited temperature overshoot; open-loop optimal input; rapid thermal processing; temperature control trade-offs; trajectory redesign technique; Actuators; Chemical technology; Cost function; Filters; Manufacturing processes; Mechanical engineering; Rapid thermal processing; Temperature control; Trajectory; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 1999. Proceedings of the 1999

Conference_Location

San Diego, CA

ISSN

0743-1619

Print_ISBN

0-7803-4990-3

Type

conf

DOI

10.1109/ACC.1999.782743

Filename

782743