Title :
Trade-offs in temperature control of fast-ramp RTP systems
Author :
De Roover, Dick ; Devasia, Santoshd
Author_Institution :
SC Solutions Inc., Santa Clara, CA, USA
Abstract :
Trade-offs in temperature control of fast-ramp rapid thermal processing (RTP) systems from an open-loop optimal input point of view are investigated. Exact tracking of fast ramps with rates such as 250°C/sec is usually not possible if other constraints, like actuator saturation and/or limited temperature overshoot, have to be met. A recently developed trajectory redesign technique allows to trade-off exact tracking versus other limitations in an optimal way. Application of this technique to a model of a generic RTP system exemplifies the possibilities and limitations of fast-ramping temperature control
Keywords :
control system synthesis; optimal control; process control; rapid thermal processing; semiconductor device manufacture; temperature control; actuator saturation; fast-ramp RTP systems; limited temperature overshoot; open-loop optimal input; rapid thermal processing; temperature control trade-offs; trajectory redesign technique; Actuators; Chemical technology; Cost function; Filters; Manufacturing processes; Mechanical engineering; Rapid thermal processing; Temperature control; Trajectory; Virtual manufacturing;
Conference_Titel :
American Control Conference, 1999. Proceedings of the 1999
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-4990-3
DOI :
10.1109/ACC.1999.782743
