DocumentCode
3429168
Title
Diamond nucleation by activated CVD
Author
Spitsyn, B.V.
Author_Institution
Inst. of Phys. Chem., Acad. of Sci., Moscow, Russia
fYear
2001
fDate
26-30 June 2001
Firstpage
25
Abstract
Summary form only given. The authors compare experimental observations on diamond nucleation with relative data connected with other substances adhering in finely dividing state to the nonidentical substrates. The most important phenomena closely controlling diamond nucleation by CVD are: vapor phase content, crystallization temperature, substrate nature and others.
Keywords
chemical vapour deposition; crystallisation; diamond; elemental semiconductors; nucleation; semiconductor thin films; C; CVD; crystallization temperature; diamond; thin films; vapor phase content; Atomic measurements; Crystallization; Etching; Hydrogen; Joining processes; Process control; Solids; Substrates; Temperature control; Thermodynamics;
fLanguage
English
Publisher
ieee
Conference_Titel
Wide Bandgap Layers, 2001. Abstract Book. 3rd International Conference on Novel Applications of
Conference_Location
Zakopane, Poland
Print_ISBN
0-7803-7136-4
Type
conf
DOI
10.1109/WBL.2001.946538
Filename
946538
Link To Document