DocumentCode
3430127
Title
Influence Of The After-Growth Treatment Of InSb Films On Acoustic Attenuation In InSb-LiNbO/sub 3/
Author
Veselov, A.G. ; Ryabushkin, S.L. ; Shuller, I.Y.
Author_Institution
Institute of Radio Engineering and Electronics of the Russian Ac. Sci.
fYear
1994
fDate
17-23 May 1994
Keywords
Acoustic devices; Acoustic measurements; Aluminum; Attenuation; Conductive films; Frequency; Plasma measurements; Semiconductor films; Surface acoustic waves; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location
Moscow, Russia
Type
conf
DOI
10.1109/ISSWAS.1994.662530
Filename
662530
Link To Document