Title :
Influence Of The After-Growth Treatment Of InSb Films On Acoustic Attenuation In InSb-LiNbO/sub 3/
Author :
Veselov, A.G. ; Ryabushkin, S.L. ; Shuller, I.Y.
Author_Institution :
Institute of Radio Engineering and Electronics of the Russian Ac. Sci.
Keywords :
Acoustic devices; Acoustic measurements; Aluminum; Attenuation; Conductive films; Frequency; Plasma measurements; Semiconductor films; Surface acoustic waves; Surface treatment;
Conference_Titel :
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location :
Moscow, Russia
DOI :
10.1109/ISSWAS.1994.662530
