Thermal design considerations for Greek cross test structures

This paper analyses the temperature rises associated with the currents forced during the measurement of Greek cross test structures. Simulations were performed using Finite Element (FE) analysis software which indicated that the temperature can be dramatically reduced by decreasing the arm length and increasing the pad size of the Greek cross. Using these design rules it was practically confirmed that higher currents could be forced through Greek crosses without significant Joule heating. As a result the voltage sensed when the Greek cross is measured is increased making the resolution of the voltmeter a less important issue.