DocumentCode :
3431408
Title :
A new type of wide-range vacuum sensor
Author :
Deulin, Evgenii A. ; Galakhar, Alexander S. ; Basmanov, Mikhail S.
Author_Institution :
Bauman Moscow State Tech. Univ., Moscow
fYear :
2009
fDate :
10-13 Feb. 2009
Firstpage :
1
Lastpage :
5
Abstract :
This work is focused on simplification of a residual pressure measurement. The presented simple and reliable tribology based vacuum sensor allows measuring of the residual pressure in the range of 105 Pa to 10-10 Pa. It can substitute all other high and ultrahigh vacuum gauges with itself.
Keywords :
pressure measurement; sensors; vacuum gauges; residual pressure measurement; ultrahigh vacuum gauges; wide-range vacuum sensor; Friction; Gas detectors; Geometry; Mechanical engineering; Mechanical sensors; Pressure measurement; Region 8; Sensor phenomena and characterization; Silicon; Vacuum technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Technology, 2009. ICIT 2009. IEEE International Conference on
Conference_Location :
Gippsland, VIC
Print_ISBN :
978-1-4244-3506-7
Electronic_ISBN :
978-1-4244-3507-4
Type :
conf
DOI :
10.1109/ICIT.2009.4939520
Filename :
4939520
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3431408
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