Taking advantage of tool´s performance for dynamic lot dispatch

A method for dynamic matching of wafer lots waiting for processing and available tools to maximize wafer output. Wafer lot information and tool capability and availability is provided. Priority wafer lots are processed first. All permutations of the remaining no priority lots and available tools are then formed. The longest process time for each permutation is then calculated. A permutation wafer per hour (PWPH) equal to the total number of wafers processed for each permutation divided by the longest process time for that the permutation is calculated. If only one permutation has the highest PWPH that the permutation is selected for processing. If more than one permutation has the highest PWPH, the total wafer per hour (TWPH) equals to the sum of the wafer per hour capability of each tool in the permutation that is calculated for those permutations. Any permutation with the highest PWPH and TWPH is selected for processing.