• DocumentCode
    3431539
  • Title

    Prioritized automatic material handling services in 300 mm foundry manufacturing

  • Author

    Wang, Chia-Nan ; Liao, Da-Yin

  • Author_Institution
    Nat. Chiao Tung Univ., Hsinchu, Taiwan
  • fYear
    2002
  • fDate
    10-11 Dec. 2002
  • Firstpage
    109
  • Lastpage
    114
  • Abstract
    This paper presents a heuristic approach for differentiating material handling services in a highly automated environment of 300 mm foundry manufacturing. A preemptive dispatching policy, Highest Priority Job (HPJ) first, is proposed to expedite the movement of high priority products while keeping acceptable the incurred delays on regular ones. Simulation experiments based on realistic data from a local 300 mm foundry fab are conducted. Numerical results demonstrate that the proposed policy is excellent in reducing the transport delays of high priority products to some extremes. Features of HPJ are also discussed.
  • Keywords
    digital simulation; dispatching; hoists; integrated circuit manufacture; materials handling; wafer bonding; 300 mm; foundry manufacturing; highest priority job; overhead hoist transport; preemptive dispatching policy; prioritized automatic material handling service; semiconductor wafer manufacturing; transport delay; wafer fabrication; Delay; Foundries; Inspection; Manuals; Manufacturing automation; Manufacturing processes; Materials handling; Production; Semiconductor device manufacture; Semiconductor materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Technology Workshop, 2002
  • Print_ISBN
    0-7803-7604-8
  • Type

    conf

  • DOI
    10.1109/SMTW.2002.1197385
  • Filename
    1197385