Title :
Operation model for split RUNCARD automation in 300 mm environment
Author :
Liu, Andrew C P ; Gong, H.M. ; Lin, W.Y. ; Hsu, Shalom H J
Author_Institution :
Taiwan Semicond. Manuf. Co., Hsin-Chu, Taiwan
Abstract :
Split RUNCARD operation is positioned to be a manual operation in semiconductor environment for a long time; not only the equipment is in manual mode, further more, it is impossible for fab users to trace the lot related information. "Operation model for Split RUNCARD automation" is an operation reference model that describe the principle of how to create an add-on CIM system to enable a manufacturing execution system supporting split RUNCARD event, especially for the 300 mm equipment\´s auto mode.
Keywords :
computer integrated manufacturing; integrated circuit manufacture; monolithic integrated circuits; semiconductor device manufacture; 300 mm; CIM system; fab user; manufacturing executing system; operation model; semiconductor environment; split RUNCARD automation; Computer integrated manufacturing; Contamination; Environmental management; Manuals; Manufacturing automation; Manufacturing industries; Manufacturing processes; Modems; Semiconductor device manufacture; Transportation;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197389
