Title :
Inkless process automation improvement on backend
Author :
Huang, Alec ; Hu, Victor ; Chen, Rex ; Mao, Rui
Author_Institution :
Macronix Int. Co. Ltd., Hsinchu, Taiwan
Abstract :
The evolution of the technique of the semiconductor industry changes with each passing day. The requirements for full process automation and cost reduction are also gradually becoming imperative. The assembly technique has moved from online ink to off-line ink, but these two techniques will still make some impacts on the wafer quality and increase the cost. Through our research, we have developed the "Inkless system". It significantly improves the degree of assembly automation and the quality of wafers, and also reduces a considerable the amount of cost, which satisfies the requirements for high yield rate and high business processing efficiency.
Keywords :
assembling; cost reduction; materials handling; process design; real-time systems; semiconductor device manufacture; assembly automation; business processing efficiency; cost reduction; inkless process automation; mapping rules; off line ink; online ink; semiconductor industry; wafer bank; wafer quality; yield rate; Assembly; Automatic testing; Automation; Costs; Databases; Ink; Manufacturing processes; Packaging; Production facilities; System testing;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197391
