Title :
Process optimization and productivity improvement by real-time data collection system
Author :
Luoh, Tuung ; Yang, Ling-Wuu ; Shih, Hsueh-Hao ; Huang, Chi-Tung ; Chen, Kuang-Chao ; Hwang, Yaw-Lin ; Hsueh, Calvin ; Chung, Henry
Author_Institution :
Macronix Int. Co. Ltd., Hsinchu, Taiwan
Abstract :
Factory automation data management (FADM) system is a real-time computer control system. It can record all the process and hardware parameters during processing. The functions in the software include GUI, data communication, digital I/O, D/S control, etc. FADM was adopted in two single-wafer thermal process chambers, in-situ steam generation (ISSG) oxidation and LPCVD poly-silicon (POLYgen), to real-time monitoring the process parameters during processing. Mini-marathon tests for POLYgen and ISSG processes demonstrated that FADM could help engineers to obtain the process stability and its limitation. According to the FADM results, the chambers were retrofitted for process optimization.
Keywords :
data acquisition; data handling; factory automation; graphical user interfaces; integrated circuit manufacture; process control; real-time systems; GUI software; LPCVD polysilicon; POLYgen; computer control system; digital I/O control; factory automation data management system; hardware parameter; in situ stream generation oxidation; process optimization; real-time system; single wafer thermal process chamber; Automatic control; Communication system control; Control systems; Data communication; Graphical user interfaces; Hardware; Manufacturing automation; Oxidation; Productivity; Real time systems;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197394
