Scalable ground-shielded open fixture applied to de-embedding techniques

To save die space, introducing scalability to de-embedding fixtures is essential. This paper introduces a way to apply scalable ground-shielded open fixture to de-embedding techniques. The de-embedding process can be carried out using only one ground-shielded open-fixture for several different-size DUTs. The validity of this proposed method that enables scalability has been verified by measurements and by applying it to commonly used de-embedding methods. Also the possibilities for bi-directional scaling are studied. Several sets of in-fixtures were fabricated using 0.35μm three-metal-layer CMOS technology.