DocumentCode
3431967
Title
Low Temperature Silicon Oxinitride Technology for Compact CMOS Compatible Planar Optical Devices
Author
Bayat, Khadijeh ; Chaudhuri, Sujeet K. ; Safavi-Naeini, Saffiedin
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Waterloo, Waterloo, ON
fYear
2007
fDate
24-27 June 2007
Firstpage
1
Lastpage
3
Abstract
We have developed a low temperature CMOS compatible silicon oxinitride based optical integrated circuit technology. The wide range of the refractive indices, 1.45-1.75, has been achieved which is applicable for compact planar optical waveguide devices.
Keywords
CMOS integrated circuits; optical planar waveguides; refractive index; silicon compounds; SiON; compact CMOS compatible planar optical devices; compact planar optical waveguide devices; low temperature silicon oxinitride technology; optical integrated circuit technology; refractive indices; CMOS technology; Integrated circuit technology; Integrated optics; Optical devices; Optical planar waveguides; Optical refraction; Optical variables control; Optical waveguides; Silicon; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Internet, 2007 and the 2007 32nd Australian Conference on Optical Fibre Technology. COIN-ACOFT 2007. Joint International Conference on
Conference_Location
Melbourne, VIC
Print_ISBN
978-0-9775657-3-3
Electronic_ISBN
978-0-9775657-3-3
Type
conf
DOI
10.1109/COINACOFT.2007.4519157
Filename
4519157
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