DocumentCode
3432051
Title
Processing of Diamond: Towards All-Diamond Integrated Optics
Author
Hiscocks, Mark P. ; Kaalund, C.J. ; Ladouceur, Francois ; Gibson, Brant C. ; Trpkovski, Steven ; Huntington, Shane T. ; Simpson, David ; Ampem-Lassen, Eric ; Hossain, Faruque ; Hollenberg, Lloyd ; Prawer, Steven ; Butler, James E.
Author_Institution
Sch. of EE&T, Univ. of New South Wales, Sydney, NSW
fYear
2007
fDate
24-27 June 2007
Firstpage
1
Lastpage
3
Abstract
Diamond photonic devices present a range of opportunities due to their unique properties. This paper presents progress in the fabrication of diamond waveguides using reactive ion etching (RIE), as a step towards all-diamond optics.
Keywords
diamond; integrated optics; optical fabrication; optical materials; optical waveguides; sputter etching; C; RIE; all-diamond integrated optics; diamond waveguides; reactive ion etching; Australia; Etching; Integrated optics; Lithography; Optical devices; Optical films; Optical waveguides; Physics; Quantum computing; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Internet, 2007 and the 2007 32nd Australian Conference on Optical Fibre Technology. COIN-ACOFT 2007. Joint International Conference on
Conference_Location
Melbourne, VIC
Print_ISBN
978-0-9775657-3-3
Electronic_ISBN
978-0-9775657-3-3
Type
conf
DOI
10.1109/COINACOFT.2007.4519162
Filename
4519162
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