Title :
Implementation of Taiwan´s Semiconductor Equipment Evaluation and Qualification (SEEQ) project
Author :
Wang, J.C. ; Ke, K.H. ; Wang, P.Y.
Abstract :
This paper discusses the issues developed in the planning of the upcoming Taiwan Semiconductor Equipment Evaluation and Qualification (SEEQ) project. Details about its background, motive, advantage and difficulty are depicted.
Keywords :
electronics industry; equipment evaluation; marketing; planning; semiconductor device manufacture; Taiwans semiconductor equipment evaluation qualification; planning; Benchmark testing; Databases; Electronics industry; Fabrication; Industrial economics; Integrated circuit modeling; Laboratories; Machinery; Qualifications; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197428
