Title :
Runtime decision-making for recipe control
Author :
Hsu, Hsien-Jung ; Chou, Joe ; Jann, Larry
Author_Institution :
Taiwan Semicond. Manuf. Co., Ltd., Hsin-Chu, Taiwan
Abstract :
A recipe controls the parameter setting on each process step. Process integration engineer need a pre-defined a recipe in the manufacturing execution system (MES). However, it is not true that he/she can decide a proper recipe in advance. We propose two recipe control mechanisms to optimize the recipe according to the run-time information automatically. The first mechanism is called compliance recipe. A specification manager does not have to define the actual recipe of a process monitor lot. The second mechanism is an embedded recipe conversion tag. It is a powerful mechanism to decide the best recipe by run-time information.
Keywords :
computer aided production planning; decision making; embedded systems; manufacturing systems; process control; compliance recipe; embedded recipe conversion tag; manufacturing execution system; parameter setting; process integration engineer; process monitoring; recipe control; run time information; runtime decision-making; Automatic control; Data engineering; Decision making; Image converters; Maintenance engineering; Manufacturing processes; Monitoring; Production; Runtime; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197437
