DocumentCode
3433974
Title
Micromachining of bulk glass with tightly-focused femtosecond laser pulses
Author
Schaffer, Chris B. ; Brodeur, André ; García, José F. ; Mazur, Eric
Author_Institution
Dept. of Phys., Harvard Univ., Cambridge, MA, USA
Volume
1
fYear
1999
fDate
1999
Abstract
Summary from only given. By focusing femtosecond laser pulses with high numerical-aperture microscope objectives, we micromachine optical glass using energies that are in the range of modern laser oscillators. When a femtosecond laser pulse is tightly focused inside a transparent material, energy deposition occurs only at the focus, where the laser intensity is high enough to cause absorption through nonlinear processes. When enough energy is deposited, the material is damaged and a localized change in the index of refraction is produced. By scanning the focus through the sample, very precise, three-dimensional microstructuring can be achieved
Keywords
laser materials processing; micromachining; nonlinear optics; optical fabrication; optical focusing; optical glass; optical microscopes; bulk glass micromachining; energy deposition; femtosecond laser pulse; femtosecond laser pulse focusing; index of refraction; laser intensity; modern laser oscillators; nonlinear processes; numerical-aperture microscope objectives; optical focusing; optical glass; optical scanning; three-dimensional microstructuring; tightly focused; tightly-focused femtosecond laser pulses; transparent material; Glass; Laser modes; Micromachining; Nonlinear optics; Optical materials; Optical microscopy; Optical pulses; Optical refraction; Pulsed laser deposition; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location
San Francisco, CA
ISSN
1092-8081
Print_ISBN
0-7803-5634-9
Type
conf
DOI
10.1109/LEOS.1999.813539
Filename
813539
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