Three dimensional hybrid wafer scale integration using the GE high density interconnect technology

A three-dimensional multichip technology is discussed. It provides solutions to the interconnect and packaging problems associated with very high density requirements of large distributed processing systems and large solid-state memory systems. The technical approach involves an extension of the 2D multichip module (MCM) circuits fabricated with the high-density-interconnect (HDI) overlay technology. These are then stacked and interconnected with a modified version of the 2D HDI interconnect process applied to the side edges of the stack. Test structures and a stack of function circuit circuits are fabricated and tested. The features of this approach, a description of the process, and the results of tests on the demonstration vehicles are presented.